cristelle

State the functionality of Hoods present in thermal oxidation apparatus.

Hoods are present in Thermal Oxidation Apparatus. Please explain the purpose of these hoods in semiconductor fabrication.
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babaa
The hood reduces dust and particulate matter in the air surrounding the wafers and minimizes contamination during wafer loading. Source: http://in.docsity.com/en-docs/Silicon_Oxidation-Fundamentals_of_Semiconductor_Fabrication-Lecture_Slides_
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