barnard

How Plasma is produced?

Plasma can be utilized to apply etching of the semiconductor surface. Please elaborate the process used for the production Plasma.
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kali
Plasma is produced when an electric field of sufficient magnitude is applied to a gas, causing the gas to break down and become ionized. Source: http://in.docsity.com/en-docs/Etching-Fundamentals_of_Semiconductor_Fabrication-Lecture_Slides_
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