cristelle

What Oxidation temperature is maintained in Thermal Oxidation Apparatus?

Oxides are obtained from Thermal Oxidation Apparatus. Please Mention the standard temperature that should be maintained in thermal Oxidation Apparatus.
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babaa
The Oxidation temperature is generally in the range of 900°C to 1200°C, and the typical gas flow rate is about 1 L/min. Source: http://in.docsity.com/en-docs/Silicon_Oxidation-Fundamentals_of_Semiconductor_Fabrication-Lecture_Slides_
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jutt
An ingredient semiconducting material drenched thermal oxidation apparatus carries a bedroom system through an inner tube that contain water and support any specimen and a third party tube capturing the lining tube forming a close off, and also a heat tank which has a heater for warming the actual specimen as well as the mineral water.
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