"What are the benefits of combining physical and chemical Etching? "

Sometimes physical and chemical etching can be combined while implementing plasma etching. Please explain the advantage of using these two techniques together.

leonpan

almost 12 years ago

Fundamentals of Semiconductor Fabrication

Name the software used for the simulation of Etching.

Simulation is a virtual method to analyze the working progress of a process using software. Please give name of the simulation software of Etching.

magicphil

almost 12 years ago

Fundamentals of Semiconductor Fabrication

What is the advantage of using Damascene technique?

Damascene processing uses a trench or a canal to apply an etching. Please mention some of the benefits associated with Damascene technique.

stagist

almost 12 years ago

Fundamentals of Semiconductor Fabrication

Explain the process of Damascene.

Damascene is an etching technique that uses aluminum or copper. Please explain the general procedure to applying Etching using this technique.

michaelporter

almost 12 years ago

Fundamentals of Semiconductor Fabrication

Why copper is preferred as a metallization material especially in ULSI circuits?

Now a day’s copper is preferred for making ICs instead of Aluminum. Please explain the extensive use of copper as a metallization material instead of AL.