Semiconductor Technology - Fabrication of MOSFETs, Study notes for Physics of semiconductor devices. Indian Institute of Information Technology (IIIT)
manish
manish3 September 2011

Semiconductor Technology - Fabrication of MOSFETs, Study notes for Physics of semiconductor devices. Indian Institute of Information Technology (IIIT)

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Detail Summery about Fabrication of MOSFETs, Fabrication process flow, Besic steps, Fabrication of the nMOS transister, Device isolation techniques, Local oxidation of selicon.
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