Explain the idealistic approch?What are the main goals of that approach?
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Dry oxidation results in a higher-quality oxide that is denser and has a higher breakdown voltage (5-10 MV/cm). • It is for these reasons that the...
Most of the growth occurs in the wet phase, since the Si02 growth rate is much higher when water is used as the oxidant. Source: [http://in.doc...
Ga or Al • Silicon nitride is used as an alternative masking material for these elements. Source: [http://in.docsity.com/en-docs/Silicon_Ox...