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hw 2 Material Type: Notes; Professor: Liu; Class: MEMS Devices & Systems; Subject: Electrical and Computer Engr; University: University of Illinois - Urbana-Champaign; Term: Fall 2011;
Typology: Study notes
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Fall 2011
b) Redraw the model when a force F 1 is applied to mass M 1 in the same direction as F 2 , but F 2 =0.
c) How does the model change if the mass M 2 becomes infinitely massive?
a) A SiO 2 suspended membrane with diameter of 50μm is fabricated on a Silicon substrate. Uniform pressure is applied across the membrane and displaces it upwards. Draw a lumped element mechanical model for the membrane, showing all forces, springs, dampers, and displacements. Assume displacement is constant over entire membrane.
b) State what physical dimensions or characteristics of the surrounding environment could be used to i) decrease the mass m by half ii) increase the spring constant k iii) decrease the damping b
c) Draw an equivalent electrical circuit showing all current flows and forces. Also, draw the same circuit in the Laplace domain.
d) Derive the transfer function of the system by getting an expression for the
force vs. displacement: ()
F s
X s H s
