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Material Type: Notes; Class: Practical Optics Seminar Engineering of Optical Systems; Subject: OPTICAL SCIENCES; University: University of Arizona; Term: Fall 2006;
Typology: Study notes
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Samples for cover movies courtesy of Sandia National Laboratories
Outline
-^ Practical interferometers • Alignment procedure • Summary
Applications of interferometer • Typical Parts Measured – Optics (flats, spheres, torics, aspheres, prisms, substrates, windows)– Semiconductor Products (wafers, MEMS, packaging material)– Data Storage (hard disk read heads, disks, suspensions)– MEMS (pressure sensors, accelerometers, micro-mirrors)– Cutting and Grinding Implements (drill bits, razors, sandpaper)– Food and Drug Products (cereal, chocolate, pills)– Medical Implants (stents, hip implants, bio-MEMS)– Precision Machine Parts (air bearings, engine blocks, fuel injectors,airplane wings)– Coatings (AR, drug coatings, anti-corrosion coatings) • Typical Measurement Results – Flatness/Shape– Critical Dimensions– Roughness– Depths and Volumes– Film thickness– Dynamic Response
Types of interferometers • Michelson Interferometer• Mach-Zehnder interferometer• Fizeau interferometer• Twyman-Green interferometer• Mirau interferometer• … …
Mach-Zehnder interferometer
M BS
BS M Applications:Data storage• Hard disk read heads• Micro lens• Beam quality
Fizeau interferometer
TF^ RF
Applications:• Optics• Semiconductor products• Data storage• MEMS• Precision machine parts
Mirau interferometer
ReferenceBS^ Sample
Applications:• Semiconductor products• Data Storage• MEMS• Cutting and grinding implements• Food and drug products• Medical implants• Precision machine parts• Coatings
Outline
General procedure
Example 1
1.06um interferometer for LIGO^ REFERENCES:1. Sen Han,
et al ., “Retrace error for the measurement of a long- radius optic,”ICO Technical Digest, Vol. 3749, 597-598, (1999).2. Sen Han,
et al ., “Design of an interferometer for the measurement of long radius optics,” SPIE Proceedings, Vol. 3966 (2000).
Requirements for design and alignment
Real product
Alignment procedure
Alignment laser
Fiducial
Retrace error
