Overview
What is LIGA process
Historical background
Types
Advantages
Applications
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Liga Process-Mechanical Engineering-Project Presentation, Study Guides, Projects, Research of Mechanical Engineering
This presentation is for project of Mechanical Engineering course. Project was supervised by Gopi Chopra at Ambedkar University, Delhi. Its main points are: LIGA, Process, Lithography, Electroplating, Polymer, Replication, Development, Stripping, Acceleration, Sensor
Typology: Study Guides, Projects, Research
2011/2012
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Overview
What is LIGA process
Historical background
Types
Advantages
Applications
What is liga process
Liga process is a German acronym for lithography,electroplating and polymer replication.
It describes fabrication technology
used to create
high aspect micro structures.
Processing steps in liga process
The processing steps in liga process
Exposure
Development
Electroforming
Stripping
replication
Types of liga process
LIGA PROCESS
X-Ray Liga
UV-Light Liga
X-ray liga pr0cess
In the process x-ray sensitive polymer known aspolymethymethaacrylate photo resist bonded to electricallyconductive substrate is exposed to parallel beams of highenergy x-ray from radiation source through mask partlycovered with x-ray observing material.
Chemical removal of exposed photoresist results in threedimensional structure which can be filled withelectrodepositing of metal.
The resist is chemically resist away to produce insert mold.
The mold insert can be used to produce the parts.
UV-Liga process
UV liga utilizes an inexpensive ultraviolet light source,like a mercury lamp, to expose a polymer photoresist,typically SU-8.
Because heating and transmittance are not an issue inoptical masks, a simple chromium mask can besubstituted for the technically sophisticated X-ray mask.
These reductions in complexity make UV liga much cheaper and more accessible than its X-ray counterpart.
However, UV liga is not as effective at producing precision molds and is thus used when cost must be keptlow and very high aspect ratios are not required.
Applications
Liga process used for many smart systems such asacceleration sensor or optical devices.
Micro spectrometer
Gold gears for wrist watches
Nickel gears for gear trains for micro and minimotors