MEMSActuators.doc 01/08/09
Project Concept: Synchronized Actuator Controller
Student-generated project proposed by Bryan Goessling, Ryan Wolff, and Tom Lucas
Sponsor: Dr. Cindy K. Harnett
General Description
With the many advancements of MEMS, including ones that sample stream water by grasping onto
particles, one starts to wonder if there is a way to enable movement at this level and what sort of power
and complexity is required. With the use of MEMS actuators, a precise deflection of a MEMS 'limb' can
be achieved by heating via a controlled current source. By careful placement and synchronization, the
actuators could potentially enable the unit to move, such as by jumping or walking. This relies on metal-
oxide filaments that change their curvature as they are heated by such means as applying a current of
around 1 to 30 mA. Currently, there is a need for a system and user interface to control this actuation
and to enable synchronization of multiple actuators.
The goal of this project is to design and implement a control system capable of synchronizing the
actuators as set by an interface, as well as controlling their deflection precisely. By heating the
actuators in particular patterns, a MEMS device with these attached actuators could effectively move
itself to a destination by internal logic or an external interface. A user could then signal the robot to
move in the basic directions, while the controller can synchronize the actuators to drive such a
movement.
Design Study
The design study will further define the expectations of the sponsor.
Also, the design study will give insight into the following:
The variance in the resistance of a metal-oxide filament as it flexes due to temperature for
possible closed-loop control
The control problems presented as the number of filaments on the silicon wafer varies
The ability to monitor and change temperature of the system with a closed-loop controller
Methods of user control and additional features will also be considered
Specific Expectations and Deliverables
Develop a controller to monitor and manage temperature, therefore controlling the actuation of
the filaments
Prepare a complete, detailed control system design.
Build and test a prototype system, including a user interface.
Use of electron microscope to produce videos to evaluate the performance of our circuit.
Number of Students in Team
Three.
