3x00 XY-Stage
Transit/Settling Time
Engr/Math/Physics 25
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Transit and Settling Time - Computational Methods - Lecture Slides, Slides of Calculus for Engineers
These are the Lecture Slides of Computational Methods which includes Thévenin’s Equivalent Circuit, Circuit Simplification, Analysis of Power Transfer, Voltage Division, Analytical Game Plan, Array Operation, Element Operations, Number of Allowable Values etc.Key important points are: Transit and Settling Time, Antivibration Table, Accelerometer Output, Full Cross-Wafer, Accelerometer Specifications, Stage Transit-Time Model, Transit-Time Vs Transit-Distance, Program System for Die Jumps
Typology: Slides
2012/2013
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3x00 XY-Stage
Transit/Settling Time
Engr/Math/Physics 25
Executive Summary
- Test Procedure
- Attach Accelerometer to 3xxx Stage
- Move Stage in Short, Medium, Long Runs
- Record Accelerometer OutPut With Oscope
- Estimated SETTLING TIME: <15ms
- Olympus Stage Transit-Time Model
- d ≡ Travel Distance in mm
- T (^) t ≡ Transit Time in mS
T = [ 4. 37 mS mm] ⋅ d + 46. 5 mS
t
Test Design
- Attach Accelerometer to XY-Stage
- Measure Accelerometer Output w/ Oscope
- Program System for Die Jumps on 200mm wafer
with KLARRF Map Die Patterns
- X-Pitch = 7.8408280000e+03 μm (7.8408 mm)
- Y-Pitch = 1.4138693000e+04 μm (14.1387 mm)
- Die Jumps: L↔R, T↔B, UL↔LR, UR↔LL
- Full Cross-Wafer (long) Moves
- 4-Die Moves
- Single-Die Moves
Stage-Move Profiles – 200mm Wafer
LEGEND
LONG MOVE
4-DIE MOVE
SINGLE-DIE MOVE
174.4 mm
12.7mm
50.9 mm
AVG. DISTANCE
Results & Analysis
cont.
- Max Z-Acceleration = 5.92g
- Y-Axis “Rattles” about 4-TIMES More than the
X-Axis
OTA-3220 Stage Transit-Time Test • Oct
t = 4.3725d + 46. R^2 = 0.
0
100
200
300
400
500
600
700
800
900
0 20 40 60 80 100 120 140 160 180
Stage Travel Distance (mm)
Stage Travel Time (mS)
Travel-Time (mS)
file = OTA3200_Stage-Settling_Time_0210.XLS
Velocity/Slope = 229 mm/S
OTA-3220 Stage Settling • Single-Die UR-Diag Move
0
50
100
150
200
250
300
350
400
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.
Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc)
Vhi (Vdc)
file = OTA3200_Stage-Settling_Time_0210.XLS
OTA-3220 Stage Settling • Single-Die +y Move
0
50
100
150
200
250
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.
Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc)
Vhi (Vdc)
Lt Boundary
Rt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~12.8ms
OTA-3220 Stage Settling • Single-Die DIAG-LR Move
0
50
100
150
200
250
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.
Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc)
Vhi (Vdc)
Lt Boundary
Rt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~14.4ms
OTA-3220 Stage Settling • Single-Die DIAG-LR Move
0
20
40
60
80
0.110 0.115 0.120 0.125 0.130 0.135 0.
Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc)
Vhi (Vdc)
Lt Boundary
Rt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~14.
AcceleroMeter Specifications
KLARFF Map Details