3x00 XY-Stage
Transit/Settling Time
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Transit Settling Time - Computational Methods - Lecture Slides, Slides of Computational Methods
Some concept of Computational Methods are Midair Collision, Applied Math, Row and Column Vectors, Arrays Two, Charged Particle, Optimize Distribution, Functions Two, Handles Types, Integration One. Main points of this lecture are: Transit Settling Time, Effecting Planer Motion, Stage, Record Accelerometer, Output, Oscope, Estimated Settling Time, Transit-Time Model, Olympus Stage, Travel Distance
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2012/2013
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3x00 XY-Stage
Transit/Settling Time
Effecting Planer Motion
An XY
Stage
Goals & Logistics
- Goals → For 3xxx XY-Stage Determine
- Typical AntiVibration-Table Settling Time
- Model: Transit-Time vs. Transit-Distance
- Logistics
- Test Date = 15-Oct-
- Experimenters = B. Mayer, CEE
- Test System = YYY-3xxx
- Hi-Accuracy XY-Stage
- Mechanical (i.e., spring-based)
AntiVibration Table
Test Design
- Attach Accelerometer to XY-Stage
- Measure Accelerometer Output w/ Oscope
- Program System for Die Jumps on 200mm wafer
with KLARRF Map Die Patterns
- X-Pitch = 7.8408280000e+03 μm (7.8408 mm)
- Y-Pitch = 1.4138693000e+04 μm (14.1387 mm)
- Die Jumps: L↔R, T↔B, UL↔LR, UR↔LL
- Full Cross-Wafer (long) Moves
- 4-Die Moves
- Single-Die Moves
Instrumentation
Fluke-199 200 MHz
ScopeMeter
Omega ACC-PS
AcceleroMeter
Power Supply
Cables To/From
AcceleroMeter
Stage-Move Profiles – 200mm Wafer
LEGEND
LONG MOVE
4-DIE MOVE
SINGLE-DIE MOVE
174.4 mm
12.7mm
50.9 mm
AVG. DISTANCE
Results & Analysis
cont.
- Max Z-Acceleration = 5.92g
- Y-Axis “Rattles” about 4-TIMES More than the
X-Axis
- Suggests inquiry into the source of the added
Settling Time
OTA-3220 Stage Transit-Time Test • Oct
t = 4.3725d + 46. R^2 = 0.
0
100
200
300
400
500
600
700
800
900
0 20 40 60 80 100 120 140 160 180 Stage Travel Distance (mm)
Stage Travel Time (mS)
Travel-Time (mS)
file = OTA3200_Stage-Settling_Time_0210.XLS
Velocity/Slope = 229 mm/S
OTA-3220 Stage Settling • Single-Die UR-Diag Move
0
50
100
150
200
250
300
350
400
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0. Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc)
Vhi (Vdc)
file = OTA3200_Stage-Settling_Time_0210.XLS
Ramps Only
OTA-3220 Stage Settling • Single-Die +y Move
0
50
100
150
200
250
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0. Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc) Vhi (Vdc) Lt Boundary Rt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~12.8ms
OTA-3220 Stage Settling • Single-Die DIAG-LR Move
0
50
100
150
200
250
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0. Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc) Vhi (Vdc) Lt Boundary Rt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~14.4ms
OTA-3220 Stage Settling • Single-Die DIAG-LR Move
0
20
40
60
80
0.110 0.115 0.120 0.125 0.130 0.135 0. Time (s)
AcceleroMeter Output (mVdc)
Vlo (Vdc) Vhi (Vdc) Lt Boundary Rt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~14.
All Done for the COURSE
See You in
Fall 2012
All Done for Today
An XY
Stage